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Journal of Vacuum Science and Technology, Part B

Description
the official journal of the AVS


Status
active
Subject

Source type
Journal
Publisher
ISBN ISSN
0734-211x; 1071-1023
First volume
4
Last volume
18
Homepage
Description
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures.











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