JAMP-7810 Scanning Auger Microprobe
The JAMP-7810 is an Auger microprobe utilizing a LaB6 gun. It also employs a low-aberration CF (Corrected Field) objective lens with multiple lens gaps arranged for optimum magnetic field distribution, and a double-stage condenser lens system. This allows a fine probe (8nm in secondary electron imaging (SEI) and 35 nm in Auger electron analysis) to be obtained over a wide current range.
The JAMP-7810 allows SEI TV image observation at low magnifications (down to x20). At 90° tilt, the high-tilt goniometer stage prevents charges from accumulating on the surfaces of insulator specimens by increasing the amount of secondary electrons emitted and thus providing for effective analysis of nonconductive specimens.
The electron energy analyzer of the JAMP-7810 is optimally designed for Auger analysis. With high energy resolution, it provides a powerful tool for chemical state analysis of features smaller than 1 µm.