WORLDWIDE EQUIPMENT TECHNOLOGY CENTER
166 Keystone Drive
In 1927 Matheson Gas Products became the first company to offer a reliable source of high quality scientific gases and equipment. From the start, Matheson asserted its leadership by understanding specialty gas applications and providing products specially designed for these applications. Some of Matheson's more notable accomplishments include the development of the lecture bottle, now used by virtually every major college and university in the world, and the supply of ultra pure gases that served as standards for the first gas chromatographs. Matheson's gases also helped forge the most important tool of our era, the integrated circuit. From the early days of the transistor, Matheson was there providing the arsine and phosphine that made production possible. As transistors gave way to complex semiconductor chips, Matheson provided the world's first commercially produced silane, an accomplishment that earned the industry's prestigious "SEMMY" Award.#
In 1999 Matheson Gas Products merged with Tri-Gas, Inc., to form Matheson Tri-Gas, Inc. This merger combined the analytical and semiconductor strengths of Matheson Gas Products with the liquid/bulk and industrial cylinder and equipment capabilities of Tri-Gas. As a member of the Tokyo based Taiyo Nippon Sanso Corporation (TNSC), Matheson Tri-GasŪ is part of the world's largest supplier of gases and gas handling equipment.
Worldwide Capabilities Matheson Tri-GasŪ and NSC provide a network of manufacturing, customer service and distribution facilities that stand ready to ensure a reliable supply of specialty gases and gas handling equipment. With sites worldwide, Matheson Tri-GasŪ products can be found in every major integrated circuit plant and R&D facilities in North America, Europe and Asia.
The Science of Specialty Gases Specialty gases play a critical role in analytical and process applications. With so much at stake, Matheson Tri-GasŪ offers excellence in five distinct areas to deliver the highest quality product.
Raw Materials Selection As the world's first specialty gas company, Matheson Tri-GasŪ has the expertise required to select the appropriate raw materials for the intended product. Acceptance criteria are based on the impact to the process and product. Non-compliant raw materials are rejected. In addition, Matheson Tri-GasŪ' suppliers are audited on a regular basis and required to meet certification requirements.
Manufacturing Once the quality requirements of the raw materials are satisfied, Matheson Tri-GasŪ uses the latest manufacturing, purification and filtration techniques to produce gases that meet the needs of the semiconductor and analytical industries. Matheson Tri-GasŪ has developed dedicated purification procedures for semiconductor grade gases that are designed to produce required purity levels.
Each process is optimized for the specific gas to be purified and combines high quality filtration with low temperature distillation and gas phase partitioning.
Mixtures Volumetric, gravimetric and partial pressure methods are used for precise mixing of component gases. In addition, highly accurate pressure gauges and specially designed and precisely calibrated scales are used to ensure proper composition.
Finally, mixtures are made homogenous by specialized rolling sequences designed by Matheson Tri-GasŪ engineers to ensure complete blending.
Packaging The handling and treatment of cylinders is key to Matheson Tri-GasŪ' success in specialty gas. Cylinders are prepared using a proprietary treatment designed to remove any moisture, atmospheric and particle contamination. Valves are chosen based on the specific application. Compatibility of materials, level of purity required and cost impact are included in the decision making process.
Analysis Prior to shipping, Matheson Tri-GasŪ certifies the quality of all of its specialty gases to ensure that all of the products meet the customer's specifications. Each sampling program has been designed to provide sound statistical evidence of product purity. The analytical methods employed are consistent with the best available techniques as defined by Semi Standards and current industry practices.
Matheson Tri-GasŪ has specialty gas production facilities located throughout the US.
Quality With the increased cost of "poor quality" in industry today, quality and consistency become paramount. Matheson Tri-GasŪ provides a full line of specialty gases and equipment to meet the specification for each impurity analyzed. To ensure product consistency and integrity, all of Matheson Tri-GasŪ production processes, materials and analytical tools are managed using statistical control methods. In addition, Matheson Tri-Gas measures its quality system against ISO 9000 series standards.
Matheson Tri-GasŪ' Quality Policy Quality is meeting the customer's requirements and expectations. Build quality into every product and service, rather than inspect it in. Continuous improvement requires the participation of all employees. Quality and fitness for purpose are the true measures of value.
Research & Development At Matheson Tri-GasŪ, service does not end at the customer's receiving dock. Assisting in process and product development is an essential part of the Matheson Tri-GasŪ offering. By beta-site testing new products prior to introduction, Matheson Tri-GasŪ maintains a leadership position in providing a global offering of field proven specialty gas and equipment solutions. In addition, a staff of scientists and engineers continually interacts with customers to improve material specifications and suggest process improvements. This results in Matheson Tri-GasŪ customers achieving the greatest benefit from Matheson Tri-Gas capabilities.
The Matheson Tri-GasŪ charter is to develop the highest purity materials with accurate specifications for metallic and particulate impurities and the specialized gas handling equipment to ensure purity. Focusing on developing advancements in new materials and analytical and production techniques, Matheson Tri-GasŪ delivers statically proven process control, state-of-the-art packaging and the ultimate in analytical procedures and equipment.
Matheson Tri-GasŪ research has led to the continual introduction of new products such as: -ULTIMA Gases: 99.9999+% purity and guaranteed low metals content. -SDSŪ Safe Delivery Source, a unique approach to the delivery of arsine, phosphine and enriched boron trifluoride for ion implantation. -State-of-the-Art Metal Precursors such as tungsten hexafluoride and dimethyl aluminum hydride (DMAH).
Product Line The semiconductor and analytical industries depend on the reliable supply of high-purity process gases and gas handling equipment to maintain efficient production and high yields. In response to this need, Matheson Tri-GasŪ offers innovative application-specific solutions.
Utilizing extensive experience in the specialty gas business, Matheson Tri-GasŪ has the processes employed in the manufacturing and the purification of specialty gases to produce products that provide the most value to its customers. The state-of-the art facility in Gloucester, Massachusetts in just one example. This automated filling operation produces high purity process gases in a carefully controlled environment designed to minimize impurities. To further ensure purity, Matheson Tri-GasŪ specifically designed the ULTRA-LINEŪ cylinder to maintain the integrity of the gas. A specific treatment is applied to the cylinder's interior walls that reduces particulates and other contaminants. ULTRA-LINEŪ cylinders have been proven to enhance product stability and extended shelf life.
With the ability to provide customized mixes and container configurations tailored to meet specific product applications, Matheson Tri-GasŪ offers a comprehensive line of specialty gases to the semiconductor and analytical industries.
Matheson Tri-GasŪ also offers the most extensive line of gas handling equipment in the specialty gas industry. Products are designed and manufactured at the Equipment Technology Center in Montgomeryville, PA. This 85,000 sq. ft. facility features 4,000 sq.ft. of Class 10 Protocol clean room space and 30,000 sq.ft. of manufacturing space.
Furthermore, Matheson Tri-GasŪ is dedicated to enhancing its customers' success by understanding process requirements and providing value added solutions. In addition to the supply of process gases, Matheson Tri-GasŪ stands ready to assist in every phase of specialty gas selection and delivery including:
Process Piping and Distribution Design
Global Distribution and Sales
These capabilities enable Matheson Tri-GasŪ to deliver truly comprehensive solutions to improve overall equipment efficiency and process yields.
From the beginning, Matheson Tri-GasŪ' objective has been to help customers stay abreast of rapid advances in technology by developing custom-tailored products that meet the dynamic needs of the industrial, analytical and semiconductor industries. Dedicating resources in new product development, production, delivery, technical support, and customer service, Matheson Tri-GasŪ stands ready to deliver the highest value in the supply of specialty gas solutions worldwide.