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The establishment of EVISA is funded by the EU through the Fifth Framework Programme (G7RT- CT- 2002- 05112).


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Glossary


SIMS


Secondary ion mass spectrometry (SIMS) is a mass-spectrometric technique that is used for microscopic chemical analysis. A beam of primary ions with an energy of 5- 20 kiloelectronvolts (keV) bombards a small spot on the surface of the sample under ultra- high vacuum conditions. Positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer in regards to their mass-to-charge ratio.

EVISA Instrument Database: SIMS systems


The term "SIMS" was found in the following pages:



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