JXA-8500F Electron Probe Microanalyzer (EPMA)
The JXA-8500F is a high performance thermal field emission electron probe microanalyzer combining high SEM resolution with high quality X-ray analysis of sub-micron areas.
The JXA-850OF employs a patented "in-lens" Schottky type field emission electron gun which enables a much higher probe current with a much smaller probe diameter than conventional FE electron guns. With WDS (wavelength dispersive X-ray spectrometer), high probe current, and small probe diameter, the JXA-8500F is capable of extreme elemental analysis of sub-micron areas.
- 3nm secondary electron resolution
- Differentially pumped electron optics column
- Excellent EDS and WDS geometry
- High level analysis with simple operation
- Large sample handling