The SUPRA™ 40 is a general purpose high resolution FESEM based on the 3rd generation GEMINI® column. Excellent imaging properties combined with analytical capabilities makes this workhorse suitable for a wide range of applications such as materials development, failure analysis, process control, cryo, nanotechnology and analytical applications. The large specimen chamber for the integration of optional detectors and accessories enables the user to configure the SUPRA™ 40 for specific applications without sacrificing productivity or efficiency.
Superb resolution and image quality at low operating voltages
Wide operating voltage range with minimal adjustments required
Short working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
High probe current (up to 20 nA) and high stability better than 0.2 %/h for analytical applications
High efficiency In-lens detector for clear topographic imaging in high vacuum mode
Large 5-axes motorised eucentric stage
Easy operation through Windows® based SmartSEM™ control software