Full Wafer Magnetic Sector SIMS for Advanced Semiconductor Metrology
The CAMECA IMS Wf is a fully automated ion microprobe with benchmark performance in semiconductor ultra low energy depth profiling. It fulfills an increasing demand for fast SIMS analysis and monitoring of surface contamination in ultra shallow implants and thin layers.
Derived from the SC Ultra (magnetic sector SIMS combining EXtreme Low Impact Energy capabilities with high mass resolution and high sensitivity), the IMS Wf adds full 300mm wafer mapping and analysis capabilities.
Wafer handling is performed by means of a robot and a shuttle designed to accomodate wafer sizes from 50 to 300 mm in diameter.